AIXTRON SE, a leading provider of deposition
systems for the semiconductor industry, has launched operations with a new
R&D cluster that demonstrates the core processes used to produce organic
semiconductors. This enables the various processes for the deposition of
organic thin-films, which are required for the manufacture of OLEDs and
flexible electronics, to be demonstrated efficiently and under industrial
production conditions.
The cluster, which has been
installed in a cleanroom at AIXTRON, comprises several process modules used in
the deposition of organic materials on 200x200mm substrates (“Gen1”). This size
allows AIXTRON to demonstrate to potential customers the advantages of its
deposition technologies on the device level at affordable cost and effort. At
the core of the demonstrator are three of AIXTRON’s OVPD modules and one PVPD
module. These are embedded in an automated cluster environment and supplemented
by various process modules and relevant infrastructure.
AIXTRON’s proprietary OVPD and PVPD
process technology allows the production of highly even organic thin-films with
high material efficiency and high deposition rates that are needed to produce
OLEDs, organic electronics, and other functional elements. The efficient,
large-scale production of organic thin-films is viewed as a key to OLEDs
achieving further market penetration. (Source: Society for Information Display)
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