◈ Company Information
EV Group (EVG) is a global supplier of Wafer Bonders, Aligners, Coaters / Developers, Temporary Bonders / Debonders (Laminator), Cleaners Inspection Systems.
EV Group (EVG) is a global supplier to Advanced Packaging, 3D Interconnect,MEMS (MicroElectroMechanical Systems), SOI (Silicon-On-Insulator), Compound Semiconductor and Silicon based Power Devices, Nanotechnology.
EV Group holds the dominant share of the market for wafer bonding equipment (especially SOI bonding) and is a leader in lithography for advanced packaging and nanotechnology.
◈ Product
- Nanoimprint Lithography Systems (UV-NIL, µCP)
EV Group provides a complete product line for UV-based nanoimprint lithography including single step UV-imprinting systems and step and repeat large area UV-nanoimprinting systems.
- Lithography
The companys key competencies in lithographic technology lie in the high-throughput contact and proximity exposure capabilities of its mask aligners (EVG600, EVG6000, EVG IQ series) and in its highly integrated coating platform (EVG100 series). All of EVGs lithography equipment platforms are 300mm ready, can be fully integrated into its HERCULES lithography track systems, and are complemented by its metrology tools for top-to-bottomside alignment verification.
- Automated Wafer Bonding system
EVG offers fully integrated and highly automated production systems for wafer bonding processes. A maximum level of automation and process integration opens the door to large-scale manufacturing and guarantees a proven transition of processes from R&D stage to production.
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